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The aqueous Cassette Box
Cleaning System is the most cost effective and easy-to-use cleaning system
available in the market today. Environmentally safe, non-toxic chemistries
added to water enhances its ability to remove contaminates, organic,
inorganic and ionic. The system is configured to clean, rinse and dry
wafer cassettes, cassette carriers, cartridges and glass panel display
containers.
The process chamber is the central
feature of the ENV 1000. The carousel is integrated into the process
chamber with adjustable bars for holding a range of part sizes with spray
manifolds for effective cleaning, rinsing and drying. The ENV 1000 is
controlled by a PLC completer system. The process of Cleaning, Rinsing and
Drying take place in this enclosure where chamber fluids are continuously
filtered. The structural dynamics of the chamber are designed to minimize
the entrapment of water and water vapors prior to the drying process.
Heated fluids and N2/air gases are trapped within the chamber by a sealed
hatch door.
The
ENV 1000 aqueous Cassette Box Cleaning System is the most cost effective
and easy-to-use cleaning system available in the market today. It is
perfect for cleaning wafer cassettes, cassette carriers, cartridges and
glass panel display containers.
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HyperFlo ENV 1000
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